Previous studies in low pressure magnetized capacitively coupled radio frequency (RF) plasmas operated in argon with optimized geometric reactor symmetry have shown that the magnetic asymmetry effect (MAE) allows to control the particle flux energy distributions at the electrodes, the plasma symmetry, and the DC self-bias voltage by tuning the magnetron-like magnetic field adjacent to one electrode (Oberberg et al 2019 Plasma Sources Sci. Technol. 28 115021; Oberberg et al 2018 Plasma Sources Sci. Technol. 27 105018). In this way non-linear electron resonance heating (NERH) induced via the self-excitation of the plasma series resonance (PSR) was also found to be controllable. Such plasma sources are frequently used for reactive RF magnetron sputtering, but the discharge conditions used for such applications are significantly different compared to those studied previously. A high DC self-bias voltage (generated via a geometric reactor asymmetry) is req...

中文翻译：

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Ar / O 2中几何不对称电容耦合射频放电中的磁不对称效应

先前对在氩气中以优化的几何反应堆对称性进行操作的低压磁化电容耦合射频（RF）等离子体的研究表明，磁非对称效应（MAE）可以控制电极处的粒子通量能量分布，等离子体对称性和通过调节与一个电极相邻的磁控管状磁场来实现直流自偏置电压（Oberberg等人2019 Plasma Sources Sci.Technol.28 115021; Oberberg等人2018 Plasma Sources Sci.Technol.27 105018）。通过这种方式，还发现了通过等离子体串联共振（PSR）的自激引起的非线性电子共振加热（NERH）是可控的。这种等离子源经常用于反应性射频磁控溅射，但用于此类应用的放电条件与之前研究的条件相比有很大不同。需要高直流自偏置电压（通过几何电抗器不对称产生）。