We demonstrate the power enhancement of planar-type uni-leg poly-Si thermoelectric generators by nano-patterning. The thermoelectric generators were fabricated on an SOI wafer by a conventional lithography-based process. The size of the phononic nano-patterning (300 nm in period) was designed based on the thermal phonon mean free path spectrum. The thermal conductivity of the Si membrane was reduced by 60% compared with an unpatterned one, which resulted in the doubled thermoelectric figure-of-merit. The nano-patterning increased the temperature gradient in the Si membrane and resulted in a four times higher voltage and ten times larger power density.

中文翻译：

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纳米结构平面型单腿硅热电发电机

我们通过纳米图案展示了平面型单腿多晶硅热电发生器的功率增强。通过常规的基于光刻的工艺在SOI晶圆上制造热电发生器。基于热声子平均自由程谱，设计了声子纳米图案的尺寸（周期为300 nm）。与无图案的硅膜相比，Si膜的热导率降低了60％，从而使热电品质因数增加了一倍。纳米图案增加了Si膜中的温度梯度，导致电压提高了四倍，功率密度提高了十倍。