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A metal-electrode-free, fully integrated, soft triboelectric sensor array for self-powered tactile sensing
Microsystems & Nanoengineering ( IF 7.3 ) Pub Date : 2020-08-10 , DOI: 10.1038/s41378-020-0154-2
Lingyun Wang 1 , Yiming Liu 2 , Qing Liu 3 , Yuyan Zhu 3 , Haoyu Wang 1 , Zhaoqian Xie 4 , Xinge Yu 2 , Yunlong Zi 1
Affiliation  

The dramatic advances in flexible/wearable electronics have garnered great attention for touch sensors for practical applications in human health monitoring and human–machine interfaces. Self-powered triboelectric tactile sensors with high sensitivity, reduced crosstalk, and simple processing routes are highly desirable. Herein, we introduce a facile and low-cost fabrication approach for a metal-electrode free, fully integrated, flexible, and self-powered triboelectric tactile sensor array with 8-by-8 sensor units. Through the height difference between the sensor units and interconnect electrodes, the crosstalk derived from the electrodes has been successfully suppressed with no additional shielding layers. The tactile sensor array shows a remarkable sensitivity of 0.063 V kPa–1 with a linear range from 5 to 50 kPa, which covers a broad range of testing objects. Furthermore, due to the advanced mechanical design, the flexible sensor array exhibits great capability of pressure sensing even under a curved state. The voltage responses from the pattern mapping by finger touching demonstrate the uniformity of the sensor array. Finally, real-time tactile sensing associated with light-emitting diode (LED) array lighting demonstrates the potential application of the sensor array in position tracking, self-powered touch screens, human–machine interfaces and many others.



中文翻译:

用于自供电触觉传感的无金属电极、完全集成的软摩擦电传感器阵列

柔性/可穿戴电子产品的巨大进步引起了触摸传感器在人体健康监测和人机界面实际应用中的极大关注。非常需要具有高灵敏度、低串扰和简单处理路线的自供电摩擦电触觉传感器。在此,我们介绍了一种简便且低成本的制造方法,用于具有 8×8 传感器单元的无金属电极、完全集成、灵活且自供电的摩擦电触觉传感器阵列。通过传感器单元和互连电极之间的高度差,在没有额外屏蔽层的情况下成功抑制了来自电极的串扰。触觉传感器阵列显示出 0.063 V kPa –1的卓越灵敏度线性范围从 5 到 50 kPa,涵盖了广泛的测试对象。此外,由于先进的机械设计,柔性传感器阵列即使在弯曲状态下也表现出强大的压力传感能力。手指触摸模式映射的电压响应证明了传感器阵列的均匀性。最后,与发光二极管 (LED) 阵列照明相关的实时触觉传感展示了传感器阵列在位置跟踪、自供电触摸屏、人机界面等方面的潜在应用。

更新日期:2020-08-10
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