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Automated extraction of barrier heights for asymmetric MIM tunneling diodes
Solid-State Electronics ( IF 1.4 ) Pub Date : 2020-08-08 , DOI: 10.1016/j.sse.2020.107879
Wallace Lin , Darsen D. Lu , Yi-Xiu Hong , Wei-Chou Hsu

Cowell’s method of extracting barrier heights of top and bottom electrode metals in asymmetric metal-insulator-metal (MIM) tunneling diodes exhibiting Fowler-Nordheim tunneling is successfully automated. Pt-Al2O3-TiN MIM diodes with 5 nm insulator thickness are used in demonstration. Conditions assuring successful application of Cowell’s method and its automation are discussed.



中文翻译:

自动提取非对称MIM隧穿二极管的势垒高度

Cowell提取具有Fowler-Nordheim隧穿的不对称金属-绝缘体-金属(MIM)隧穿二极管中顶部和底部电极金属的势垒高度的方法已成功实现自动化。演示中使用了绝缘体厚度为5 nm的Pt-Al 2 O 3 -TiN MIM二极管。讨论了确保Cowell方法及其自动化成功应用的条件。

更新日期:2020-08-08
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