We show how a CD-TEM (Critical Dimension-Transmission Electron Microscope) can be used to acquire EDS (Energy Dispersive X-ray Spectroscopy) tomograms, which allow chemical mapping in 3D for most elements in the sample. This is achieved by developing a recipe using ordinary commands also used in CD-TEM programming. In addition, we demonstrate how detector shadowing can be reduced significantly by using a special specimen holder and modified grids. The recipe, which runs autonomously and automatically, is verified using examples from modern FinFET and non-volatile memory devices.

中文翻译：

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CD-TEM 向 3D 元素映射的扩展


我们展示了如何使用 CD-TEM（临界尺寸透射电子显微镜）获取 EDS（能量色散 X 射线光谱）断层图，从而可以对样品中的大多数元素进行 3D 化学映射。这是通过使用 CD-TEM 编程中也使用的普通命令开发配方来实现的。此外，我们还演示了如何通过使用特殊的样品架和改进的网格来显着减少探测器阴影。该配方可自主自动运行，并使用现代 FinFET 和非易失性存储设备的示例进行验证。