An aluminum nitride (AlN) piezoelectric resonant infrared (IR) detector based on a Lame-wave resonator (LWR) and plasmon apertures was designed for dual-band sensing, and was investigated by using the finite element method (FEM) and finite difference time domain (FDTD) simulations. A plasmon structure with the apertures was designed on the surface of the detector in order to maintain electrical performance and to obtain ultrahigh dual-band IR absorption. The electrical performance of the LWR with the plasmon apertures was comparable to that of the LWR with floating electrodes, which was found to be superior to that of the LWRs with plasmon particles or open electrodes. Both of the rectangle aperture and cross-shaped aperture absorbers can achieve ultrahigh dual-band absorptions of up to 97%, and the cross-shaped aperture absorber is insensitive to the polarization angle. Moreover, a detailed optimization analysis for the thermal properties of the detector was conducted to obtain favorable responsivity and response speed. The calculated results demonstrate that the proposed resonant detector has great potential applications in IR detection.

中文翻译：

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基于AlN的具有等离子孔径吸收器的双波段红外传感共振探测器的数值研究

设计了基于La波谐振器（LWR）和等离激元孔径的氮化铝（AlN）压电谐振红外（IR）检测器，用于双频带传感，并通过有限元方法（FEM）和有限差分时间进行了研究。域（FDTD）模拟。为了保持电性能并获得超高双频红外吸收，在检测器的表面上设计了带有孔的等离子体激元结构。具有等离激元孔的LWR的电性能与具有浮置电极的LWR的电性能相当，发现其优于具有等离激元颗粒或开放电极的LWR的电性能。矩形孔和十字形孔吸收器均可实现高达97％的超高双频吸收，十字形孔径吸收器对偏振角不敏感。此外，对探测器的热性能进行了详细的优化分析，以获得良好的响应度和响应速度。计算结果表明，所提出的谐振检测器在红外检测中具有巨大的潜在应用。