Imaging mass spectrometry (IMS), based on linking mass-analysis data for ions and their original positions in a sample, allows the visualization of the spatial distribution of atomic and/or molecular species in the sample, and is therefore an essential analytical method for the characterization of chemical and biological materials. For sensitive elemental and chemical imaging using IMS, a sufficient amount of ions to be analyzed should be supplied from the analyzing area on the sample surface. Secondary ion mass spectrometry (SIMS) using energetic cluster ions (ECIs) with energies of sub-MeV and above as primary ions (ECI-SIMS) can provide the secondary ions necessary for the characterization of organic materials with high emission yields. Hence, ECI-SIMS is a good method for highly sensitive IMS. We report recent progress in ECI beam manipulation techniques for applications of ECI-SIMS to highly sensitive IMS together with the characteristics of ECI impacts on organic materials.

成像质谱（IMS）基于链接样品中离子及其原始位置的质量分析数据，可以可视化样品中原子和/或分子种类的空间分布，因此是进行分析的基本方法化学和生物材料的表征。对于使用IMS进行敏感的元素和化学成像，应从样品表面上的分析区域提供足够量的待分析离子。使用能量低于Me-MeV的高能簇离子（ECI）作为初级离子（ECI-SIMS）的次级离子质谱（SIMS）可以提供表征高排放量有机材料所需的次级离子。因此，ECI-SIMS是用于高度敏感的IMS的好方法。