Numerous research reports have demonstrated that the supply air volumes of cleanrooms areusuallyover-designed to satisfy air cleanliness classes, which may lead to enormous energy waste. In this study, five well-recognised international mathematical models for calculating cleanroom particle concentration were analysed, which are all based on uniform particle distribution in the cleanroom, indoor particle conservation, and mass airflow balance, and an improved and more general model has been established for calculating the minimum air change rates according to the expected air cleanliness class. Following the introduction of non-dimensional concentration correction factors, based on the least-squares method, the average relative error between the model-predicted and measured particle concentration is approximately 13.5%. Based on the improved model with correction factor, the test results demonstrate that the particle concentration depends mainly on the air change rate, particle emission rate and return airflow patterns, among others. When the air change rate per hour and ratio of particle concentrations between the return airflow and room average were varied from 40 h⁻¹ to 120 h⁻¹ and 0.7–1.3, respectively, the concentration consequently decreased by approximately 65% and 46%. The particle deposition caused by gravity can be neglected for small particles.

许多研究报告表明，洁净室的送风量通常经过过度设计以满足空气洁净度等级，这可能会导致巨大的能源浪费。在这项研究中，分析了五个公认的国际洁净室颗粒浓度数学模型，这些模型都是基于洁净室中颗粒的均匀分布，室内颗粒物的守恒和空气流量的平衡，并建立了改进的通用模型用于根据预期的空气清洁度等级计算最小换气率。在引入无量纲浓度校正因子之后，基于最小二乘法，模型预测的颗粒浓度和测量的颗粒浓度之间的平均相对误差约为13.5％。基于带有校正因子的改进模型，测试结果表明，颗粒物浓度主要取决于空气变化率，颗粒物排放率和返回气流模式等。当每小时的换气速度以及回风量与房间平均值之间的颗粒浓度比从40 h开始变化时浓度分别为^-1至120 h ^-1和0.7-1.3，因此浓度分别降低了约65％和46％。对于小颗粒，可以忽略由于重力引起的颗粒沉积。