A comparison measurement between 10 national metrology institutes on two types of depth setting standards was conducted using mostly tactile but also two optical instruments for measurement. Three etched silicon standards with depths of 5, 20 and 50 μm and one diamond turned nickel coated copper standard with depths of 200, 600 and 900 μm were measured. The cross section of the grooves was trapezoidal. Most of the participants confirmed their CMC entries. Since many measurements had to be made, contamination of the standards and heavy wear on the standards were also observed after the comparison was completed. The wear consists of indentation marks from stylus instruments on both types of standards and as many as 70 scratch marks on the nickel coated copper artefact used. This indicates that the contact pressure of the tactile measuring devices used by some partners was too high. This can be caused by a too high probing force or a too small probing tip radius. Thus, for future c...

中文翻译：

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测量深度范围为1μm至1 mm的沟槽深度标准件（EURAMET项目1407）

在10个国家计量机构之间，对两种深度设定标准进行了比较测量，主要使用触觉，但也使用了两种光学仪器进行测量。测量了三种深度分别为5、20和50μm的蚀刻硅标准液和一种深度为200、600和900μm的金刚石车削镀镍铜标准液。凹槽的横截面是梯形的。大多数参与者确认了他们的CMC条目。由于必须进行许多测量，因此在完成比较后还观察到标准品的污染和标准品的严重磨损。磨损包括两种类型标准的测针仪器的压痕和所用的镀镍铜制品上多达70个划痕。这表明某些伙伴使用的触觉测量设备的接触压力过高。这可能是由于探测力太大或探测头半径太小所致。因此，对于未来的...