The inner tracker of the ATLAS detector is scheduled to be replaced by a completely new silicon-based inner tracker (ITk) for the Phase-II of the CERN LHC (HL-LHC). The silicon strip detector covers the volume $40<R<100$ cm in the radial and $\left|z\right|<$300 cm in the longitudinal directions. The silicon sensors for the detector will be fabricated using the n${}^{+}$-on-p 6-inch wafer technology, for a total of 22,000 wafers. Intensive studies were carried out on the final prototype sensors ATLAS17LS fabricated by Hamamatsu Photonics (HPK). The charge collection properties were examined using penetrating ⁹⁰Sr $\beta$-rays and the ALIBAVA fast readout system for the miniature sensors of 1 cm $\times$1 cm in area. The samples were irradiated by protons in the 27 MeV Birmingham Cyclotron, the 70 MeV CYRIC at Tohoku University, and the 24 GeV CERN-PS, and by neutrons at Ljubljana TRIGA reactor for fluence values up to 2 × 10¹⁵ n${}_{\mathrm{eq}}$/cm${}^2$ . The change in the charge collection with fluence was found to be similar to the previous prototype ATLAS12, and acceptable for the ITk. Sensors with two active thicknesses, $300\mathrm{\mu }\mathrm{m}$ (standard) and $240\mathrm{\mu }\mathrm{m}$ (thin), were compared and the difference in the charge collection was observed to be small for bias voltages up to 500 V. Some samples were also irradiated with gamma radiation up to 2 MGy, and the full depletion voltage was found to decrease with the dose. This was caused by the Compton electrons due to the ⁶⁰Co gamma radiation. To summarize, the design of the ATLAS17LS and technology for its fabrication have been verified for implementation in the ITk. We are in the stage of sensor pre-production with the first sensors already delivered in January of 2020.

ATLAS检测器的内部跟踪器计划替换为用于CERN LHC（HL-LHC）II期的全新基于硅的内部跟踪器（ITk）。硅带探测器覆盖体积$40<\mathrm{[R}<100$ 径向厘米 $\left|ž\right|<$纵向300厘米。探测器的硅传感器将使用n${}^{+}$-on-p 6英寸晶圆技术，总计22,000个晶圆。对由Hamamatsu Photonics（HPK）制造的最终原型传感器ATLAS17LS进行了深入的研究。使用渗透⁹⁰ Sr检查电荷收集特性$\beta$射线和ALIBAVA快速读取系统，用于1厘米的微型传感器 $\times$面积1厘米。样品分别在27 MeV伯明翰回旋加速器，东北大学的70 MeV CYRIC和24 GeV CERN-PS质子辐照，并在卢布尔雅那TRIGA反应堆中被中子辐照，辐照度值最高为2×10 ¹⁵ n${}_{\mathrm{当量}}$/厘米${}^2$。发现具有能量密度的电荷收集中的变化与先前的原型ATLAS12类似，并且对于ITk是可接受的。具有两种有效厚度的传感器，$300\mathrm{\mu }\mathrm{米}$ （标准）和 $240\mathrm{\mu }\mathrm{米}$进行了比较（薄），对于高达500 V的偏置电压，电荷收集的差异很小。还对一些样品进行了高达2 MGy的伽马射线辐照，发现全耗尽电压随着剂量。这是由于⁶⁰ Co伽马射线引起的康普顿电子引起的。总而言之，已经验证了ATLAS17LS的设计及其制造技术可在ITk中实施。我们正处于传感器的预生产阶段，第一批传感器已于2020年1月交付。