Abstract X-ray topography (XRT) was performed on a ( 2 ¯ 0 1)-oriented β-Ga2O3 substrate using various diffraction vectors (g-vectors). The defect-related contrasts could be grouped roughly into line, dot, and rod contrasts based on their shapes. Most line contrasts were caused by screw-type dislocations that extended in the 〈0 1 0〉 direction in the ( 2 ¯ 0 1) plane. The dot contrasts were attributed to dislocations that had outcrops on the ( 2 ¯ 0 1) surface, while the rod contrasts were attributed to three-dimensional defects. To analyze how the contrast of a given dislocation varied across topographs taken with different g-vectors, affine transformation was applied to correct image deformations caused by differing projection angles and precisely aligned dislocation coordinates were obtained for all images. This enabled us to perform statistical contrast analyses on a large number of dislocations. The results indicated the presence of several typical Burgers vectors, including 〈0 1 0〉, 〈0 0 1〉, 〈1 0 0〉, and 〈1 0 1 ¯ 〉. A large proportion of dislocations exhibited small Burgers vectors.

中文翻译：

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通过仿射变换 X 射线形貌的对比分析对大面积 β-Ga2O3 单晶进行位错分类

摘要 X 射线形貌 (XRT) 是在 (2¯ 0 1) 取向的 β-Ga2O3 衬底上使用各种衍射向量（g 向量）进行的。与缺陷相关的对比可以根据它们的形状大致分为线、点和棒对比。大多数线对比是由在 ( 2 ¯ 0 1) 平面中沿〈0 1 0〉方向延伸的螺旋型位错引起的。点对比归因于在 (2¯ 0 1) 表面上露头的位错，而棒对比归因于三维缺陷。为了分析给定位错的对比度如何在使用不同 g 向量拍摄的地形上变化，应用仿射变换来校正由不同投影角度引起的图像变形，并为所有图像获得精确对齐的位错坐标。这使我们能够对大量位错进行统计对比分析。结果表明存在几个典型的 Burgers 向量，包括<0 1 0>、<0 0 1>、<1 0 0> 和<1 0 1¯>。很大比例的位错表现出小的汉堡向量。