Laser produced plasma (LPP) soft x-ray and extreme ultraviolet sources utilize various types of targets. Some of them are based on gaseous targets. The most important disadvantage of such targets is the very limited number of elements that can be used in the gaseous form under normal conditions, including chemical compounds in the gaseous state. In this paper, the authors propose a new type of target, constituting an extension of the gaseous target, namely aerosol target, based on solutions of solid chemical compounds in liquids. Unlike previous attempts to produce aerosol targets from overheated liquids, in our system, the target is created by injection of a mist, preformed in a dedicated cell, into the vacuum chamber. Such targets have many advantages: the emission spectra can be adjusted by choosing proper chemical compounds, the aerosol target is elongated, hence, the laser focus can be positioned at a relatively long distance from the nozzle outlet, its average density can be higher compared to gaseous targets. In this work, such a target and its usefulness for the LPP soft x-ray source was demonstrated. The target was investigated by the soft x-ray backlighting method. Its density distribution at the position of the laser focus was determined. The emission spectra from the soft x-ray range, corresponding to multiple charged ions, originating from the solvent and the diluted salt were measured. Based on numerical simulations of the spectra, an ionic composition of the resulting plasmas was determined.

中文翻译：

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基于气溶胶靶的激光产生等离子体软 X 射线源

激光产生等离子体 (LPP) 软 X 射线和极紫外源利用各种类型的目标。其中一些基于气体目标。这种靶材最重要的缺点是在正常条件下可以以气态形式使用的元素数量非常有限，包括气态化合物。在本文中，作者提出了一种新型目标，它是气体目标的扩展，即气溶胶目标，基于固体化合物在液体中的溶液。与之前从过热液体中产生气溶胶目标的尝试不同，在我们的系统中，目标是通过将在专用单元中预先形成的薄雾注入真空室来创建的。这样的目标有很多优点：发射光谱可以通过选择合适的化合物来调整，气溶胶目标被拉长，因此，激光焦点可以定位在距离喷嘴出口相对较长的距离处，与气体目标相比，其平均密度可以更高。在这项工作中，证明了这种目标及其对 LPP 软 X 射线源的有用性。通过软X射线背光法研究目标。确定其在激光焦点位置处的密度分布。测量了来自软 X 射线范围的发射光谱，对应于来自溶剂和稀释盐的多个带电离子。基于光谱的数值模拟，确定了所得等离子体的离子组成。与气态目标相比，其平均密度可能更高。在这项工作中，证明了这种目标及其对 LPP 软 X 射线源的有用性。通过软X射线背光法研究目标。确定其在激光焦点位置处的密度分布。测量了来自软 X 射线范围的发射光谱，对应于来自溶剂和稀释盐的多个带电离子。基于光谱的数值模拟，确定了所得等离子体的离子组成。与气态目标相比，其平均密度可能更高。在这项工作中，证明了这种目标及其对 LPP 软 X 射线源的有用性。通过软X射线背光法研究目标。确定其在激光焦点位置处的密度分布。测量了来自软 X 射线范围的发射光谱，对应于来自溶剂和稀释盐的多个带电离子。基于光谱的数值模拟，确定了所得等离子体的离子组成。对应于多个带电离子，来自溶剂和稀释的盐被测量。基于光谱的数值模拟，确定了所得等离子体的离子组成。对应于多个带电离子，来自溶剂和稀释的盐被测量。基于光谱的数值模拟，确定了所得等离子体的离子组成。