A polyvinylidene fluoride (PVDF) film incorporating size-controlled, uniformly dispersed, directly patterned Bi₂O₃ nanoparticles was developed to achieve a high-k polymer nanocomposite capacitor. The photochemical metal-organic deposition (PMOD) method was employed to form uniformly dispersed and directly patterned nanoparticles on the substrate. Bi nanoparticles were produced by spin coating a Bismuth 2-ethylhexanoate solution on a Pt substrate with UV irradiation for 1, 4, 7, and 10 min. The average diameter of nanoparticles and the number of nanoparticles per unit area (μm²) were about 30, 70, and 120 nm and 30, 30, and 31 particles/μm² for UV irradiation times of 4, 7, and 10 min, respectively. In addition, the capacitance of PVDF nanocomposite film could be controlled by the Bi₂O₃ nanoparticle size. The PVDF nanocomposite film containing Bi₂O₃ nanoparticles with 1, 4, 7, and 10 min UV irradiation were able to improve capacitance by about 1.4, 2.0, 2.7, and 3.4 times compared with an as-prepared PVDF film. By using a mask aligner, directly pattered Bi nanoparticles on the substrate, which had a 5 μm line width pattern, were successfully defined and demonstrated.

中文翻译：

---

用于聚合物纳米复合电容器的可直接图案化的Bi2O3纳米颗粒

开发了一种聚偏二氟乙烯（PVDF）膜，该膜结合了尺寸受控，均匀分散，直接构图的Bi ₂ O ₃纳米颗粒，从而获得了高k聚合物纳米复合电容器。使用光化学金属有机沉积（PMOD）方法在基板上形成均匀分散并直接构图的纳米颗粒。Bi纳米粒子是通过将2-乙基己酸铋溶液在UV辐射下旋转涂覆在Pt基板上1、4、7和10分钟而制得的。纳米粒子的平均直径和每单位面积的纳米颗粒的数目（微米²）分别为约30，70，和120纳米和30，30，和31个颗粒/微米²UV照射时间分别为4、7和10分钟。另外，PVDF纳米复合膜的电容可以通过Bi ₂ O ₃纳米颗粒尺寸来控制。与制备的PVDF膜相比，包含Bi ₂ O ₃纳米粒子的PVDF纳米复合膜具有1、4、7和10分钟的紫外线照射，其电容量可提高约1.4、2.0、2.7和3.4倍。通过使用掩模对准器，成功地定义并证明了在基板上直接构图的Bi纳米粒子具有5μm的线宽图案。