This paper represents a novel method to suppress the thermal effects of flexure mechanism-based nanopositioning system by fluid (air or water) flow under certain pressure conditions through the internal fluidic channels of the compliant structure. The nanopositioning system made of stainless steel was additively manufactured, and the rectangular fluidic channels were formed on each side of the double compound type flexure mechanism-based compliant structure. The motion behavior was characterized by measuring the stiffness and frequency responses of the compliant structure with the hammering test while filling compressed air or the water through the fluidic channels. The thermal behavior was characterized by measuring the temperature distribution over the compliant structure and thermal displacement under the various compressed air pressure and water flow-rate conditions. Dynamic behaviors of the nanopositioning system under various fluid-fed conditions were also characterized by the Finite Element Method and were validated with experimental results. As a result, the compressed air- or water-fed mechanisms have the following characteristics: (1) the damping may increase when the fluid exists in the channels, (2) the compressed air-fed mechanism can move the stage with nanometer precision with fast response time, and (3) the media filled in the fluidic channels significantly lower the temperature increase and reduce thermal displacement error. Interestingly, two-fluid flows of the compressed air and water showed a similar tendency in suppressing the temperature increase. The proposed method is expected to meet the increasing needs for nanometer motion accuracies and the efforts achieving high precision in the thermally stable environments requiring from semiconductor industries and precision machine tool industries.

本文提出了一种新颖的方法，通过在一定压力条件下通过柔性结构内部流体通道的流体（空气或水）流动来抑制基于挠曲机构的纳米定位系统的热效应。增材制造了由不锈钢制成的纳米定位系统，并且在基于双复合型挠曲机构的柔性结构的每一侧形成了矩形流体通道。运动行为的特征是通过锤击测试测量顺应性结构的刚度和频率响应，同时通过流体通道填充压缩空气或水。通过在各种压缩空气压力和水流量条件下测量柔性结构上的温度分布和热位移来表征热行为。纳米定位系统在各种流体供给条件下的动力学行为也通过有限元方法进行了表征，并得到了实验结果的验证。结果，压缩空气或水馈送机构具有以下特征：（1）当通道中存在流体时，阻尼可能会增加；（2）压缩空气或馈送机构可以以纳米精度移动载物台。快速的响应时间，以及（3）填充在流体通道中的介质大大降低了温度升高并降低了热位移误差。有趣的是 压缩空气和水的两流体流动在抑制温度升高方面表现出相似的趋势。预期所提出的方法将满足对纳米运动精度的不断增长的需求以及在半导体工业和精密机床工业所需的热稳定环境中实现高精度的努力。