Based on the traveling surface acoustic wave separation mechanism, a focused acoustic sorting chip is presented in this work, which fully utilizes the focusing energy characteristics of the focused interdigital transducer (F-IDT). Firstly, the structure of the focused acoustic sorting chip and the basic parameters of F-IDT are determined by numerical analysis. Then, the related optimal operating parameters of working frequency (f), the inlet flow ratio and average velocity of main channel (Va) are determined by COMSOL simulation, namely, f = 131.83 MHz, the inlet flow ratio 10:1:1, and Va = 4 mm/s. In the lab, the prototypes of the focused acoustic sorting chip are designed and fabricated. The corresponding separation experiments are carried out using the developed acoustic sorting chip to separate the polystyrene particles with diameters of 1 μm and 10 μm, and the sorting efficiency of particles are calculated and analyzed under different power. The experimental results show that focused acoustic sorting chip can achieve particle separation and the sorting efficiency is over 99%. The proposed focused acoustic sorting chip has the advantages of simple structure, high sorting efficiency, focusing energy and contact-free particle manipulation.

基于行波表面声波分离机制，提出了一种聚焦声分类芯片，该芯片充分利用了聚焦叉指式换能器（F-IDT）的聚焦能量特性。首先，通过数值分析确定了聚焦声分选芯片的结构和F-IDT的基本参数。然后，通过COMSOL仿真确定工作频率（f），入口流量比和主通道平均速度（Va）的相关最佳工作参数，即f = 131.83 MHz，入口流量比10：1：1， Va = 4毫米/秒。在实验室中，设计并制造了聚焦声分类芯片的原型。使用开发的声波分选芯片进行相应的分离实验，分离出直径为1μm和10μm的聚苯乙烯颗粒，并在不同功率下计算和分析颗粒的分选效率。实验结果表明，聚焦声分选芯片可以实现粒子分离，分选效率达到99％以上。提出的聚焦声分选芯片具有结构简单，分选效率高，聚焦能量大，无接触粒子操纵等优点。