This paper deals with glass surface micromachined antenna of RF energy harvesting for wireless sensor node applications. The research aims to provide a system based on a new integrated RF energy harvester circuitry using a transparent receiving antenna by micromachining process. The energy harvester system is studied using CST-MWS software by Pyrex glass as the antenna substrate having dielectric constant ɛ_r = 4.6. Besides, PSpice and Cadence analyze the DC output solutions. The fabrication of the micromachined antenna based on metal patterning of the radiator patch and metal sputtering on the top and bottom of the glass surface, respectively. The analysis of the wave propagation of the antenna shows good agreement between the simulation solutions and experimental validations. It is present that the antenna achieved a maximum gain of > 4 dB, reflection coefficient (S₁₁) < − 10 dB, wide − 10 dB bandwidth of > 100 MHz, omnidirectional radiation pattern and VSWR ratio < 2. From DC analysis, with an ultra-low input power of − 20 dBm incoming from this optimal antenna, the MOSFET rectifier reaches an efficiency of 46.23% and DC output voltage of 2.15 V at 1 MΩ load. Further, the developed antenna integrated into the RF energy harvester on the same circuit platform that yield a highly efficient operating system at 5 GHz ISM band.

本文研究了用于无线传感器节点应用的射频能量收集的玻璃表面微机械天线。该研究旨在提供一种基于新的集成RF能量采集器电路的系统，该系统使用透明的接收天线通过微加工工艺制造。能量采集系统被作为具有介电常数ɛ天线基板使用CST-MWS软件由派勒斯玻璃研究_ř = 4.6。此外，PSpice和Cadence还分析了直流输出解决方案。微加工天线的制造分别基于散热器贴片的金属图案和玻璃表面顶部和底部的金属溅射。天线波传播的分析表明仿真解决方案和实验验证之间有很好的一致性。目前，天线的最大增益> 4 dB，反射系数（S ₁₁）<− 10 dB，宽− 10 dB带宽> 100 MHz，全向辐射方向图和VSWR比<2。通过直流分析，从该最佳天线获得的− 20 dBm超低输入功率，MOSFET整流器达到在1MΩ负载下的效率为46.23％，DC输出电压为2.15V。此外，已开发的天线集成在同一电路平台上的RF能量收集器中，可在5 GHz ISM频段上产生高效的操作系统。