As the current trend in numerous industrial domains is to miniaturise products, micro-positioning stage(MPS) capable of performing micro-manipulation and micro-assembly tasks with sub-micrometer or nanometer precision is playing an increasing important role in these fields. In addition, well performances and low cost are two emergency issues need to be addressed for widely using flexure-based MPSs. However, the design and fabrication process for MPSs at present are costly both in time and money. Especially, the designed configurations are tailored to a specific application without flexibility. Thus, the purpose of this paper is to introduce a design of precision flexure-based reconfigurable MPSs which provide better flexibility and functionality and allows to reduce the time to market significantly. To begin with, performance requirements and benefits for reconfigurable MPSs are introduced. Then, some typical modules and their functions are introduced in detail. Finally, some selective stages assembled with function modules are proposed as case studies, for the purpose of validating the benefits of reconfigurable MPSs.

由于在众多工业领域中的当前趋势是使产品小型化，因此能够以亚微米或纳米精度执行微操纵和微组装任务的微定位台（MPS）在这些领域中发挥着越来越重要的作用。另外，良好的性能和低成本是广泛使用基于挠曲的MPS时需要解决的两个紧急问题。但是，目前MPS的设计和制造过程既费时又费钱。特别是，设计的配置是针对特定应用而定制的，没有灵活性。因此，本文的目的是介绍一种基于挠曲的精密可重配置MPS的设计，该设计可提供更好的灵活性和功能，并可以大大缩短产品上市时间。首先，介绍了可重新配置MPS的性能要求和优势。然后，详细介绍了一些典型的模块及其功能。最后，提出一些与功能模块组装在一起的选择性阶段作为案例研究，以验证可重构MPS的好处。