Abstract

A new computational approach is developed to evaluate the strength of the error self-compensation effect in the case of broadband optical monitoring of the multilayer coating deposition process. A new form of estimating the strength of the error self-compensation effect is suggested. Computational experiments simulating the deposition process are used to study the presence of the self-compensation effect and it is shown that the assessment of two parameters characterizing the degree of error correlation and the strength of the self-compensation effect is sufficient from a practical point of view.

中文翻译：

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多层光学镀膜沉积过程中误差自补偿效应研究的计算方法

摘要

开发了一种新的计算方法来评估在多层涂层沉积过程的宽带光学监控情况下误差自补偿效应的强度。提出了一种估计误差自补偿效应强度的新形式。通过模拟沉积过程的计算实验研究了自补偿效应的存在，并且表明，从实际的角度出发，对表征误差相关程度和自补偿效应强度的两个参数进行评估是足够的。视图。