Micro/nanoparticles contamination is one of the key factors affecting the quality of precision manufacturing, and the traditional cleaning methods cannot function effectively. The laser plasma has high temperature and pressure, which can be used as a new and potential method to implement the removal of micro/nanoparticle, and it has become the focus of attention. This paper aims to analyze the particles removal process under the action of repetitively pulsed laser plasma, which is mainly composed of the changes in particle morphologies, the ultimate removal results, as well as the corresponding academic analysis based on the thermodynamic effects. Investigation results show that the particles removal characteristics depend heavily on the number of pulsed plasma, micrometer-size particles can be removed at the beginning, and then particles with the size about several hundred nanometers in the following stages. Analyzed from the morphological properties of particles, the refinemen...

中文翻译：

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激光等离子体去除纳米微粒的最终结果及形成机理研究

微米/纳米颗粒污染是影响精密制造质量的关键因素之一，传统的清洁方法无法有效发挥作用。激光等离子体具有高温高压，可作为实现去除微米/纳米颗粒的一种新的潜在方法，已成为人们关注的焦点。本文旨在分析重复脉冲激光等离子体作用下的颗粒去除过程，该过程主要由颗粒形态的变化，最终去除结果以及基于热力学效应的相应学术分析组成。研究结果表明，颗粒物的去除特性在很大程度上取决于脉冲等离子体的数量，一开始就可以去除微米级的颗粒物，然后在接下来的阶段中，粒径约为几百纳米的颗粒。从颗粒的形态学特性分析，细化...