Micro glassblowing can be utilized in the fabrication of high-precision micro shell resonator due to its acceptable cost and promising performance. Geometric imperfection characterization and electrode assembly are important but challenging tasks for manufacturing high-quality resonators. This paper characterizes the geometric imperfection of the micro shell resonator and proposes a novel precise assembly process for micro shell resonators with out-of-plane electrodes. The crucial geometric imperfections including thickness imperfection, circularity error and anchor non-planarity of the glassblowing structures are experimentally characterized. The sample resonator exhibits a circularity error below 0.2 % and an anchor non-planarity of 300 nm. The relationship between frequency asymmetry and circularity error is discussed, which can be used to predict the resonator performance. A simplified model is built to analyze the effect of gap deviation on the capacitance variation of the resonator. Finally, a sacrificial layer-free electrode assembly method is proposed, which achieves small ( $< 20~\mu \text{m}$ ) capacitance gaps with relatively low tolerance. [2019-0235]

中文翻译：

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微型壳谐振器的几何缺陷表征和精确组装

由于其可接受的成本和良好的性能，微玻璃吹制可用于制造高精度微壳谐振器。几何缺陷表征和电极组装是制造高质量谐振器的重要但具有挑战性的任务。本文表征了微壳谐振器的几何缺陷，并提出了一种新颖的具有面外电极的微壳谐振器的精确组装工艺。实验表征了玻璃吹制结构的关键几何缺陷，包括厚度缺陷、圆度误差和锚定非平面性。样品谐振器的圆度误差低于 0.2%，锚定非平面度为 300 nm。讨论了频率不对称性与圆度误差之间的关系，可用于预测谐振器性能。建立一个简化模型来分析间隙偏差对谐振器电容变化的影响。最后，提出了一种无牺牲层电极组装方法，该方法以相对较低的容差实现了较小的（$<20~\mu\text{m}$）电容间隙。[2019-0235]