We present the design and fabrication of an electrostatic side-drive micromotor that achieves the fastest operating speed reported for a device fabricated using the PolyMUMPS process. High-speed is obtained by optimizing the geometric parameters of the rotor and the stator electrodes, employing techniques to reduce friction in various regions of the micromotor and adopting multiple approaches to enhance the driving torque of the micromotor. The key geometrical parameters of the micromotor are determined through analytical modelling, bypassing intensive computational methods. The rotor diameter of the micromotor is $600~\mu \text{m}$ and has only 12 circular bearing supports each having radius of $3~\mu \text{m}$ . The rotary micromotor exhibits a speed of up to 7,875 rpm. [2019-0221]

中文翻译：

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使用 PolyMUMPS 工艺的低摩擦、高速旋转三相微电机

我们介绍了静电侧驱动微电机的设计和制造，该微电机实现了使用 PolyMUMPS 工艺制造的设备报告的最快运行速度。通过优化转子和定子电极的几何参数，采用技术减少微电机各个区域的摩擦，并采用多种方法提高微电机的驱动扭矩，从而获得高速。微电机的关键几何参数是通过分析建模确定的，绕过了密集的计算方法。微电机转子直径为 $600~\mu \text{m}$ 并且只有 12 个圆形轴承支撑，每个支撑半径为 $3~\mu \text{m}$ . 旋转微电机的速度高达 7,875 rpm。[2019-0221]