This paper reports the approach to boost the acoustic performances of PMUTs (Piezoelectric Micromachined Ultrasonic Transducers) including vibrational amplitude, acoustic pressure and electromechanical coupling by using the pinning boundary structure. An analytical model is developed based on an assumed mode shape and is validated with matching results from numerical simulations. Prototyped devices are fabricated and tested with a measured 2.5X improvement in displacement and 3.5X higher pressure output per volt at resonance as compared to those of PMUTs with clamped boundary. As a demonstration example, a PMUT-based ultrasonic tilt sensor is investigated with measured result using the receiving PMUT’s pressure amplitude for a tilting range of ±8 degrees and an error of ±0.7 degrees. [2020-0152]

中文翻译：

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具有固定边界结构的压电微加工超声换能器

本文报告了通过使用钉扎边界结构来提高 PMUT（压电微机械超声换能器）的声学性能的方法，包括振动幅度、声压和机电耦合。分析模型是基于假设的模式形状开发的，并通过数值模拟的匹配结果进行验证。与带有钳位边界的 PMUT 相比，原型设备在制造和测试时的位移提高了 2.5 倍，谐振时每伏特的压力输出提高了 3.5 倍。作为演示示例，使用接收 PMUT 的压力幅度在 ±8 度的倾斜范围和 ±0.7 度的误差范围内对基于 PMUT 的超声波倾斜传感器的测量结果进行了研究。[2020-0152]