Highly sensitive flexible NO2 sensor composed of vertically aligned 2D SnS2 operating at room temperature,Journal of Materials Chemistry C

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Highly sensitive flexible NO2 sensor composed of vertically aligned 2D SnS2 operating at room temperature
Journal of Materials Chemistry C ( IF 5.7 ) Pub Date : 2020-07-31 , DOI: 10.1039/d0tc02242j
Jung Joon Pyeon _{1,

2,

3,

4,

5} , In-Hwan Baek _{1,

2,

3,

4,

6} , Young Geun Song _{1,

2,

3,

4} , Gwang Su Kim _{1,

2,

3,

4,

5} , Ah-Jin Cho _{1,

2,

3,

4} , Ga-Yeon Lee _{4,

7,

8} , Jeong Hwan Han _{4,

9,

10} , Taek-Mo Chung _{4,

7,

8} , Cheol Seong Hwang _{4,

6,

11,

12} , Chong-Yun Kang _{1,

2,

3,

4,

5} , Seong Keun Kim _{1,

2,

3,

4}

Affiliation

Gas sensors for Internet of Things applications should meet two requisites – low power consumption and easy mounting universally. To satisfy the conditions, gas sensors need to operate at lower temperature and be flexible. In this study, we demonstrate a flexible gas sensor operating at room temperature using vertically aligned two-dimensional SnS₂ nanomaterials. The atomic layer deposition (ALD) technique allows direct growth of SnS₂ on a plastic substrate. The morphological structure of SnS₂ is engineered by effecting changes in the growth temperature and substrate surface, which leads to the excellent sensing performance with respect to NO₂ gas along with superior gas selectivity. The gas response is as high as 309 at 1 ppm of NO₂ at room temperature, and a reliably high response is also observed even below 500 ppb of NO₂. The fabricated flexible gas sensor exhibits comparable sensing performance and stability upon bending. Furthermore, the ALD achieves excellent uniformity in both the structural and electrical properties of SnS₂ over a 4 in. wafer, which is essential for mass production. Therefore, we believe that this work would contribute to realizing the practical application of highly sensitive flexible gas sensors.

中文翻译：

由在室温下垂直排列的二维SnS2组成的高度灵敏的柔性NO2传感器

用于物联网应用的气体传感器应满足两个条件-低功耗和易于通用安装。为了满足这些条件，气体传感器需要在较低的温度下工作并且具有灵活性。在这项研究中，我们演示了使用垂直排列的二维SnS ₂纳米材料在室温下运行的柔性气体传感器。原子层沉积（ALD）技术允许SnS ₂在塑料基板上直接生长。通过影响生长温度和衬底表面的变化来设计SnS ₂的形态结构，这导致对NO ₂气体的出色感测性能以及出色的气体选择性。在1 ppm NO时，气体响应高达309₂在室温下，甚至在低于500 ppb的NO_2时也观察到可靠的高响应。制成的柔性气体传感器在弯曲时具有可比的传感性能和稳定性。此外，ALD在4英寸晶圆上的SnS₂的结构和电性能均达到了极好的均匀性，这对于批量生产至关重要。因此，我们相信这项工作将有助于实现高度灵敏的柔性气体传感器的实际应用。

更新日期：2020-09-03

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