Abstract A gradient crystalline coating was created on a TiNi substrate by magnetron sputtering of a three-layer (Ti–Ni–Ti) nanolaminate with a layer thickness of 60–100 nm and subsequent argon annealing of the sample at 900°С. The coating was synthesized to study the features of its structure formation and phase composition, created by reaction synthesis to improve the corrosion resistance of TiNi implants. TEM, EDS, XRD, and EBSD methods showed that annealing initiated solid-state reaction processes between the nanolaminate layers and the substrate, as a result of which a three-layer amorphous nanolaminate transformed into a gradient two-layer coating bonded with the modified substrate through the diffusion zone. The diffusion growth of the nanolaminate layers during formation of the gradient coating was found to increase 10–20-fold. A comparative assessment of the substrate and coating has shown that oxide and oxycarbonitride layers in the coating effectively improve its biocompatibility.

中文翻译：

---

磁控溅射和退火制备的生物医用TiNi合金梯度结晶涂层

摘要 通过磁控溅射层厚为 60-100 nm 的三层 (Ti-Ni-Ti) 纳米层压板，然后在 900°С 下对样品进行氩气退火，在 TiNi 衬底上形成了梯度结晶涂层。合成涂层以研究其结构形成和相组成的特征，通过反应合成产生以提高 TiNi 植入物的耐腐蚀性。TEM、EDS、XRD 和 EBSD 方法表明，退火引发了纳米层压板层与基底之间的固态反应过程，结果三层非晶纳米层压板转变为与改性基底结合的梯度两层涂层通过扩散区。发现在形成梯度涂层期间纳米层压层的扩散增长增加了 10-20 倍。