Abstract

The gas flow in a multistage turbomolecular pump is simulated so as to optimize the design of the rotor and stator blades. Monte Carlo software reveals how pump performance is affected by the geometry of the individual stages.

中文翻译：

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多级涡轮分子真空泵中的气流

摘要

模拟了多级涡轮分子泵中的气流，以优化转子和定子叶片的设计。蒙特卡洛软件揭示了泵性能如何受到各个阶段几何形状的影响。