Electrospray deposition (ESD) applies a high voltage to liquids flowing through narrow capillaries to produce monodisperse generations of droplets down to hundreds of nanometers in diameter, each carrying a small amount of the delivered solute. This deposition method has been combined with insulated stencil masks for fabricating micropatterns by spraying solutions containing nanoparticles, polymers, or biomaterials. To optimize the fabrication process for micro-coatings, a self-limiting electrospray deposition (SLED) method has recently been developed. Here, we combine SLED with a pre-existing patterned polymer film to study SLED’s fundamental behavior in a bilayer geometry. SLED has been observed when glassy insulating materials are sprayed onto conductive substrates, where a thickness-limited film forms as charge accumulates and repels the arrival of additional charged droplets. In this study, polystyrene (PS), Parylene C, and SU-8 thin films of varying thickness on silicon are utilized as insulated spraying substrates. Polyvinylpyrrolidone (PVP), a thermoplastic polymer is sprayed below its glass transition temperature (T_g) to investigate the SLED behavior on the pre-deposited insulating films. Furthermore, to examine the effects of in-plane confinement on the spray, a microhole array patterned onto the PS thin film by laser dewetting was sprayed with dyed PVP in the SLED mode. This was then extended to an unmasked electrode array showing that masked SLED and laser dewetting could be used to target microscale regions of conventionally patterned electronics.

电喷雾沉积（ESD）对流经狭窄毛细管的液体施加高压，以产生直径为数百纳米的液滴的单分散世代，每个液滴都携带少量的溶质。此沉积方法已与绝缘模板掩模相结合，通过喷涂包含纳米颗粒，聚合物或生物材料的溶液来制造微图案。为了优化微涂层的制造工艺，最近开发了一种自限电喷雾沉积（SLED）方法。在这里，我们将SLED与预先存在的图案化聚合物膜结合在一起，以研究SLED在双层几何结构中的基本行为。当将玻璃状绝缘材料喷涂到导电基材上时，已观察到SLED，当电荷累积时会形成厚度受限的膜，并排斥其他带电液滴的到达。在这项研究中，硅上厚度不同的聚苯乙烯（PS），聚对二甲苯C和SU-8薄膜被用作绝缘喷涂基底。聚乙烯吡咯烷酮（PVP），一种热塑性聚合物，在低于其玻璃化转变温度（T_g）研究SLED在预沉积的绝缘膜上的行为。此外，为了检查面内限制对喷雾的影响，在SLED模式下，用染色的PVP喷雾通过激光去湿在PS薄膜上构图的微孔阵列。然后将其扩展到未掩盖的电极阵列，显示出可将掩盖的SLED和激光去湿法用于靶向传统图案化电子产品的微尺度区域。