Abstract

This paper presents a sensor for simultaneous pressure and temperature measurements, which is made entirely of quartz components and uses a Fabry–Perot interferometer and a fiber Bragg grating (FBG). This combination allows simultaneous temperature and pressure measurements, as well as the reduction of the contribution of temperature to the pressure measurement. The sensitive element is a quartz-glass membrane manufactured by etching. The sensitivity of the sensor to the pressure is 50 nm/bar; the sensitivity to the temperature is 4.6 nm/°C on the Fabry–Perot interferometer side and 10 pm/°C on the FBG side. It has been shown that the FBG can be used as a thermal compensating element.

中文翻译：

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基于法布里-珀罗干涉仪和布拉格光栅的用于同时测量温度和压力的光纤传感器

摘要

本文提出了一种用于同时进行压力和温度测量的传感器，该传感器完全由石英部件制成，并使用了法布里-珀罗干涉仪和光纤布拉格光栅（FBG）。这种组合允许同时进行温度和压力测量，以及减少温度对压力测量的影响。敏感元件是通过蚀刻制造的石英玻璃膜。传感器对压力的敏感度为50 nm / bar；法布里-珀罗干涉仪一侧对温度的灵敏度为4.6 nm /°C，而FBG一侧对温度的灵敏度为10 pm /°C。已经显示出，FBG可以用作热补偿元件。