Abstract A rotational windmill-shaped radio frequency magnetron plasma source has been developed for improving the target utilization rate. Two kinds of magnet arrangements are designed by taking into account the E × B drift motion of electrons using simulated magnetic field profiles, where the electric field, E, is vertical to the target and the magnetic field, B, is parallel to the target, respectively. It is found that the Hall parameters of the electrons in the magnetron area have a higher value ranging from 12 to 110 for both magnet arrangements. This is high enough to magnetize electrons, while the electron Larmor radius is as low as 0.3–2.8 mm. The target utilization rate has attained approximately 65 % and 70 % for an initial and for an improved magnet arrangements, respectively. The improved magnet arrangement has a uniform profile of the target erosion compared with the initial magnet arrangement.

中文翻译：

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一种可有效利用靶材的旋转风车形射频磁控溅射等离子体的特性

摘要 为提高靶材利用率，研制了一种旋转风车形射频磁控管等离子体源。通过使用模拟磁场剖面考虑电子的 E × B 漂移运动，设计了两种磁体排列，其中电场 E 垂直于目标，磁场 B 平行于目标，分别。发现磁控管区域中电子的霍尔参数对于两种磁体排列都有较高的值，范围从 12 到 110。这足以磁化电子，而电子拉莫尔半径低至 0.3-2.8 毫米。对于初始和改进的磁体布置，目标利用率分别达到了大约 65% 和 70%。