Electrohydrodynamic (EHD) jet printing can fabricate high resolution micro- and nano-scale lines with low cost and simple procedure. However, less attention has been paid to the fabrication of integrated nozzles with low cost and volume production capacity. In this work, three-layer SU-8 nozzles with slot dimension ranging from 10 to 50 μm were fabricated by ultraviolet photolithography and thermal bonding methods. The influence of the thicknesses (bottom and top layers) on the deformation of SU-8 nozzle was studied by numerical simulation. The results show that the suitable thicknesses should be 60 and 10 μm for bottom and top layer, to ensure the fabrication quality of SU-8 nozzles. Based on the established EHD printing platform, PEO (Polyethylene Oxide) lines with line-width from 750 nm to 8.2 μm can be printed by using the fabricated SU-8 nozzles, indicating the indicating the practicality of developed nozzle fabrication method.

电液动力学（EHD）喷射印刷可以低成本，简单地制造高分辨率的微米级和纳米级生产线。然而，很少有人关注具有低成本和大批量生产能力的集成喷嘴的制造。在这项工作中，通过紫外光刻和热粘合方法制造了缝隙尺寸为10至50μm的三层SU-8喷嘴。通过数值模拟研究了厚度（底层和顶层）对SU-8喷嘴变形的影响。结果表明，底层和顶层的合适厚度应分别为60和10μm，以确保SU-8喷嘴的制造质量。基于已建立的EHD打印平台，PEO（聚环氧乙烷）生产线的线宽范围为750 nm至8。