In this study, we theoretically demonstrate the effect of polarization in the realization of the submicron woodpile and chiral helix photonic structures formed through multi-beams interference in an umbrella geometry using a phase-only spatial light modulator (SLM). The polarization states of the interfering beams play a decisive role in the formation of submicron features when the requisite high interference angle is imparted through reflective type multi-mirror arrangements. Leaving aside the scalar model for intensity distribution, we estimate the actual scenario by taking into account the contributing vector electric fields in such SLM based multi-mirror set-up. Comparing with different interference angles, we recognize the lower limit in structural periodicities obtainable without deforming the desired photonic structures. Numerical calculations of the transmittance response of such polarization induced structures are also compared in contrast to their analogous scalar coun...

中文翻译：

---

相控多光束干涉光刻中偏振效应对实现亚微米光子结构的研究

在这项研究中，我们从理论上证明了偏振在使用仅相位空间光调制器（SLM）的伞形几何中通过多光束干涉形成的亚微米木桩和手性螺旋光子结构的实现中。当通过反射型多镜装置赋予必要的高干涉角时，干涉光束的偏振态在亚微米特征的形成中起决定性作用。除了强度分布的标量模型外，我们还考虑了这种基于SLM的多镜设置中的贡献矢量电场，从而估算了实际情况。比较不同的干涉角，我们认识到在不使所需的光子结构变形的情况下可获得的结构周期性的下限。