MEMS-based phase shifters show the best performance in terms of figure of merit, but their footprints are usually large and it is difficult to achieve several bits. This paper demonstrates a miniaturized phase shifter based on slow-wave CPW and MEMS that occupy 0.47 mm². A total phase shift of 152° was obtained with a maximum insertion loss of 3 dB, resulting in a figure of merit of 50°/dB at 60 GHz. The 3-bit device showed an insertion loss variation of 1.3 dB and return loss better than 13 dB. The pull-in and pull-out voltages were measured to be 17 V and 10 V, respectively. The presented device is well suited for mm-wave phased array applications. Thanks to the proposed concept, more bits could be easily achieved and much higher frequencies could be addressed.

基于MEMS的移相器在品质因数方面显示出最佳性能，但它们的占用空间通常很大，很难达到几位。本文演示了一种基于慢波CPW和MEMS的微型移相器，其占地0.47 mm ²。获得了152°的总相移，最大插入损耗为3 dB，在60 GHz时的品质因数为50°/ dB。3位器件的插入损耗变化为1.3 dB，回波损耗优于13 dB。测得的拉入电压和拉出电压分别为17 V和10V。提出的设备非常适合毫米波相控阵应用。由于所提出的概念，可以容易地实现更多的比特，并且可以解决更高的频率。