Advanced microanalytical techniques such as high-resolution transmission electron microscopy (HRTEM), atom probe tomography (APT), and synchrotron-based scanning transmission X-ray microscopy (STXM) enable one to characterize the structure and chemical and isotopic compositions of natural materials down towards the atomic scale. Dual focused ion beam-scanning electron microscopy (FIB-SEM) is a powerful tool for site-specific sample preparation and subsequent analysis by TEM, APT, and STXM to the highest energy and spatial resolutions. FIB-SEM also works as a stand-alone technique for three-dimensional (3D) tomography. In this review, we will outline the principles and challenges when using FIB-SEM for the advanced characterization of natural materials in the Earth and Planetary Sciences. More specifically, we aim to highlight the state-of-the-art applications of FIB-SEM using examples including (a) traditional FIB ultrathin sample preparation of small particles in the study of space weathering of lunar soil grains, (b) migration of Pb isotopes in zircons by FIB-based APT, (c) coordinated synchrotron-based STXM characterization of extraterrestrial organic material in carbonaceous chondrite, and finally (d) FIB-based 3D tomography of oil shale pores by slice and view methods. Dual beam FIB-SEM is a powerful analytical platform, the scope of which, for technological development and adaptation, is vast and exciting in the field of Earth and Planetary Sciences. For example, dual beam FIB-SEM will be a vital technique for the characterization of fine-grained asteroid and lunar samples returned to the Earth in the near future.

中文翻译：

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FIB-SEM 技术在地球和行星材料高级表征中的应用

先进的显微分析技术，如高分辨率透射电子显微镜 (HRTEM)、原子探针断层扫描 (APT) 和基于同步加速器的扫描透射 X 射线显微镜 (STXM) 使人们能够表征天然材料的结构、化学和同位素组成走向原子尺度。双聚焦离子束扫描电子显微镜 (FIB-SEM) 是一种强大的工具，用于特定位置的样品制备和随后的 TEM、APT 和 STXM 分析，以获得最高的能量和空间分辨率。FIB-SEM 也可作为 3D (3D) 断层扫描的独立技术。在这篇综述中，我们将概述在地球和行星科学中使用 FIB-SEM 对天然材料进行高级表征时的原则和挑战。进一步来说，我们的目标是突出 FIB-SEM 的最新应用，包括 (a) 在月球土壤颗粒空间风化研究中小颗粒的传统 FIB 超薄样品制备，(b) 铅同位素在月球土壤中的迁移锆石通过基于 FIB 的 APT，（c）基于协调同步加速器的 STXM 表征碳质球粒陨石中的外星有机物质，最后（d）通过切片和视图方法对油页岩孔隙进行基于 FIB 的 3D 层析成像。双光束 FIB-SEM 是一个强大的分析平台，其技术发展和适应的范围在地球和行星科学领域是广阔而令人兴奋的。例如，双光束 FIB-SEM 将成为表征在不久的将来返回地球的细粒度小行星和月球样本的重要技术。