Abstract A standardless method for the determination of nanometric thicknesses was developed on the basis of the detection of characteristic X rays. The method was developed aiming to the morphological characterization of anodes of lithium-ion batteries, particularly for those based on binder free Si/C binary composites generated by sputtering deposition. Even when the procedure was designed for this particular case of nano-stratified samples consisting of a Si film deposited onto a C layer, which in turn is deposited on a Cu substrate, it is easily extensible to other configurations. To obtain the thickness of the deepest layer it is necessary to know the thickness of the surface layer. For this reason, the calculations involve an iterative strategy based on Monte Carlo simulations. The method was validated in a set of samples whose thicknesses were also determined by Rutherford backscattering spectrometry. In addition, the method was applied to another set of anodes, giving results that matched the expected values.

中文翻译：

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通过电子探针微量分析无标准测定分层样品中的纳米厚度

摘要 在特征X射线检测的基础上，提出了一种无标准测定纳米厚度的方法。该方法的开发旨在对锂离子电池负极进行形态表征，特别是基于溅射沉积产生的无粘合剂 Si/C 二元复合材料。即使该程序是为纳米分层样品的这种特殊情况设计的，该样品由沉积在 C 层上的 Si 膜组成，而 C 层又沉积在 Cu 基板上，它也很容易扩展到其他配置。要获得最深层的厚度，必须知道表面层的厚度。因此，计算涉及基于蒙特卡罗模拟的迭代策略。该方法在一组样品中得到验证，这些样品的厚度也由卢瑟福背散射光谱法确定。此外，将该方法应用于另一组阳极，得到与预期值匹配的结果。