Enhanced sensitivity, precise measurements and accuracy are the key factors to identify the performance of any sensor. In this paper, p-polycrystalline silicon micro-pressure sensor has been design...

中文翻译：

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了解用于低压测量的 Si 圆形隔膜的动态行为

增强的灵敏度、精确的测量和准确度是识别任何传感器性能的关键因素。本文设计了p型多晶硅微压力传感器...