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Understanding vibrant behavior of Si-circular diaphragm for low-pressure measurement
International Journal of Modern Physics B ( IF 2.6 ) Pub Date : 2020-07-10 , DOI: 10.1142/s021797922050174x
Samridhi 1 , Manish Kumar 2 , Kulwant Singh 3 , Shalendra Kumar 4 , P. A. Alvi 1
Affiliation  

Enhanced sensitivity, precise measurements and accuracy are the key factors to identify the performance of any sensor. In this paper, p-polycrystalline silicon micro-pressure sensor has been design...

中文翻译:

了解用于低压测量的 Si 圆形隔膜的动态行为

增强的灵敏度、精确的测量和准确度是识别任何传感器性能的关键因素。本文设计了p型多晶硅微压力传感器...
更新日期:2020-07-10
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