ABSTRACT The tool electrode feed rate (TEFR) is a parameter of vital importance for velocity-feed electrochemical discharge drilling (ECDD). The tool electrode will hit the workpiece and may even cause to crack if higher TEFR is used, while a lower TEFR will curtail the material etch rate. Hence, a comprehensive experimental study into the TEFR effects on the ECDD performance is presented. The top and bottom sizes of micro-holes, eccentricity, circularity, heat-affected zone, and tool electrode wear are the important features considered in this experimental work. Cylindrical-shaped tungsten carbide tool electrodes with 70 μm and 300 μm sizes were utilized. The TEFR in the range of 1–9 μm s−1 were selected. The stable and uniform EC discharges were observed for the TEFR < 5 μm s−1. The minimal hole size and HAZ were obtained for the TEFR in the range of 3–4 μm s−1. The eccentricity and circularity of micro-holes were found to be lower for the TEFR < 5 μm s−1. Higher tool wear was noticed for the TEFR < 2 μm s−1. Based on the overall experimental evaluation, TEFR in the range of 3–4 μm s−1 is recommended.

中文翻译：

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工具电极进给速率对玻璃基板电化学放电钻孔的影响

摘要 工具电极进给率 (TEFR) 是速度进给电化学放电钻孔 (ECDD) 的一个至关重要的参数。如果使用较高的 TEFR，工具电极会撞击工件，甚至可能导致裂纹，而较低的 TEFR 会降低材料蚀刻速率。因此，提出了对 TEFR 对 ECDD 性能影响的综合实验研究。微孔的顶部和底部尺寸、偏心度、圆度、热影响区和工具电极磨损是本实验工作中考虑的重要特征。使用了 70 μm 和 300 μm 尺寸的圆柱形碳化钨工具电极。选择了 1–9 μm s-1 范围内的 TEFR。对于 TEFR < 5 μm s-1，观察到稳定且均匀的 EC 放电。TEFR 在 3-4 μm s-1 范围内获得了最小孔尺寸和 HAZ。发现当 TEFR < 5 μm s-1 时，微孔的偏心率和圆度较低。对于 TEFR < 2 μm s-1，注意到更高的工具磨损。根据整体实验评估，建议使用 3–4 μm s-1 范围内的 TEFR。