The diamond-like carbon (DLC) film on 316L stainless steel substrate was prepared by pulsed plasma-enhanced chemical vapor deposition, and the performance of the films was optimized by regulating the pulse voltage. Microstructure and properties of DLC film on 316L stainless steel were characterized by atomic force microscopy, field-emission scanning electron microscopy, Raman spectra, nano-indenter and electrochemical workstations. The results showed that DLC films with smooth and dense morphology have a low friction coefficient and high nano-indentation hardness, and the surface hardness of 316L stainless steel substrate was enhanced by more than 3 times. The mechanical properties of DLC films and their bond with 316L stainless steel could be further optimized by increasing pulse voltage. DLC films on 316L stainless steel substrate increased the self-corrosion potential by 0.173 V and decreased self-corrosion current by 99%, which significantly improved the anti-corrosive properties of 316L substrate.

通过脉冲等离子体增强化学气相沉积法制备了316L不锈钢基底上的类金刚石碳（DLC）膜，并通过调节脉冲电压来优化膜的性能。通过原子力显微镜，场发射扫描电子显微镜，拉曼光谱，纳米压头和电化学工作站对316L不锈钢上的DLC薄膜的组织和性能进行了表征。结果表明，具有光滑致密形貌的DLC薄膜具有较低的摩擦系数和较高的纳米压痕硬度，使316L不锈钢基材的表面硬度提高了3倍以上。通过增加脉冲电压可以进一步优化DLC膜的机械性能及其与316L不锈钢的结合力。