A novel device consisting of a set of membranes with nine different geometries and metallizations monolithically fabricated on a single die is proposed as a possible calibration sample for characterizing thermal conductance between the tip and the sample with “active” resistive scanning thermal microscope (SThM) probes. Such probes, in which the tip is significantly heated by the current used to measure their temperature-dependent resistance, are often used in investigations of the thermal conductivity of samples. Thermally grown silicon dioxide was chosen as a membrane material for all devices due to its low thermal and electrical conductivity, and gold structures were used to vary the thermal conduction to mimic a range of materials. The result showed a range of samples with thermal conductance of 15–85 times the thermal conductance quantum at room temperature, which would be typical for SThM measurements of thermal conductance resulting from contact of the tip with bulk materials having thermal conductivities ranging from those of poly methyl methacrylate to bulk silicon.

中文翻译：

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用于校准扫描热显微镜中尖端样品热导的单片制造样品

提出了一种新型装置，该装置由一组具有九种不同几何形状的膜和在单个模具上整体制造的金属化组成，可作为一种可能的校准样品，用于使用“有源”电阻扫描热显微镜 (SThM) 探针表征尖端和样品之间的热导. 这种探针的尖端被用于测量其温度相关电阻的电流显着加热，通常用于研究样品的热导率。由于其低导热性和导电性，热生长的二氧化硅被选为所有设备的膜材料，并且金结构用于改变热传导以模拟一系列材料。