This work considers the possible occurrence of two distinct phases in thin films of overall composition B1−xNx (0.21 ≤ x ≤ 0.47) grown by chemical vapor deposition from sequential pulses of diborane (B2H6) and ammonia (NH3). Two distinct peaks are identified in B1s x-ray photoelectron spectroscopy (XPS), related to two populations of B atoms with different oxidation states. The data are most consistent with a model in which one population mainly bonds to B atoms, and the other population mainly bonds to N atoms, as expected for a composite of B and BN. Based on peak broadening, interfaces between the two types contribute significantly to the spectra. Furthermore, spectroscopic ellipsometry (SE) found that the samples displayed optical absorption consistent with that of pure-B. This work, thus, developed a fit model to characterize the films optically by SE. Describing the films as composites of pure-B and BN, and using optical constants of reference layers thereof, the relative fractions could be estimated in reasonable agreement with XPS. Differences between the models and data in both SE and XPS are consistent with the effects of hydrogenation and the contribution of atoms in interface states. Evidence from SE suggests that the films may consist of stacked lamellar phases, which would indeed have a large surface-to-volume ratio.

中文翻译：

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用光学和光电子能谱研究含硼和含氮薄膜的相性质

这项工作考虑了在由乙硼烷 (B2H6) 和氨 (NH3) 的连续脉冲通过化学气相沉积生长的整体成分为 B1-xNx (0.21 ≤ x ≤ 0.47) 的薄膜中可能出现两个不同的相。在 B1s X 射线光电子能谱 (XPS) 中发现了两个不同的峰，它们与两个不同氧化态的 B 原子群有关。数据与模型最一致，其中一个群体主要与 B 原子键合，而另一个群体主要与 N 原子键合，正如 B 和 BN 的复合材料所预期的那样。基于峰展宽，两种类型之间的界面对光谱有显着影响。此外，光谱椭偏仪 (SE) 发现样品显示出与纯 B 一致的光吸收。因此，这项工作，开发了一个拟合模型来通过 SE 光学表征薄膜。将薄膜描述为纯 B 和 BN 的复合材料，并使用其参考层的光学常数，可以与 XPS 合理一致地估计相对分数。SE 和 XPS 中模型和数据之间的差异与氢化的影响和原子在界面态中的贡献是一致的。来自 SE 的证据表明，薄膜可能由堆叠的层状相组成，这确实具有很大的表面积与体积比。SE 和 XPS 中模型和数据之间的差异与氢化的影响和原子在界面态中的贡献是一致的。来自 SE 的证据表明，薄膜可能由堆叠的层状相组成，这确实具有很大的表面积与体积比。SE 和 XPS 中模型和数据之间的差异与氢化的影响和原子在界面态中的贡献是一致的。来自 SE 的证据表明，薄膜可能由堆叠的层状相组成，这确实具有很大的表面积与体积比。