The demand for polymer-based soft micro-electro-mechanical systems (MEMS) is growing due to the substantial increase of flexible and wearable electronic devices. In this context, electronically conducting polymers (ECPs) fulfil the requirements for soft MEMS by offering the possibility of actuation and sensing, however, their miniaturization, their integration attempts and their resulting performances are still limiting their use in real applications. In this work, elaboration, integration and operation of soft and efficient microtransducers based on commercially available poly(3,4-ethyledioxythiophene):poly(styrene sulfonate) conductive ink into flexible chips is demonstrated. This original process overcomes existing hurdles to the fabrication of fully integrated ECP-based devices with gold remote contacts directly in contact with ECPs and further embedding in flexible support. These batch-fabricated chips are actuated at low voltage (±3.0 V) in open-air with individual accessi...

中文翻译：

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PEDOT：基于PSS的微肌肉和微传感器完全集成在柔性芯片中

由于柔性和可穿戴电子设备的大量增加，对基于聚合物的软微机电系统（MEMS）的需求正在增长。在这种情况下，导电聚合物（ECP）通过提供致动和传感的可能性来满足软MEMS的要求，但是，它们的小型化，集成尝试及其产生的性能仍然限制了它们在实际应用中的使用。在这项工作中，展示了基于市售的聚（3,4-乙基二氧噻吩）：聚（苯乙烯磺酸盐）导电油墨的高效软，微换能器的制作，集成和操作，并在柔性芯片中进行了展示。这种原始工艺克服了制造完全集成的基于ECP的设备的现有障碍，该设备具有直接与ECP接触并进一步嵌入灵活支持的金质远程触点。这些批量制造的芯片可在露天条件下以低压（±3.0 V）进行驱动，并带有独立附件。