Reflection electron energy loss spectroscopy (REELS) has been used to study the optical and electronic properties of semi‐infinite solid samples, aided by a theoretical model of the interaction between electrons and a solid. However, REELS has not been used to its full capacity in studying nanomaterial samples because of the difficulty in modeling the electron interaction with a layered nanostructure. In this study, we present a numerical calculation result on the spatially varying inelastic mean free path for a sample comprising an Fe layer of varying thickness on an Si substrate. Furthermore, a Monte Carlo model for electron interaction with this Fe‐Si layered structure sample is built based on this inelastic scattering cross section and used to reproduce the REELS spectra of Fe‐Si layered structures. The simulated spectra of the sample with varying Fe layer thickness on top of a Si substrate were compared with the experimental spectra. This comparison clearly identifies that the Fe layer remaining on top of the experimental Si substrate after Ar⁺ beam sputtering is in the form of a homogeneous mixed layer, where the Fe/Si interface excitation is absent in the experimental spectra owing to pulverization of the Fe/Si interface during the Ar⁺ sputtering process.

中文翻译：

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Fe / Si覆盖层样品反射电子能量损失谱的蒙特卡罗模拟研究

借助电子与固体相互作用的理论模型，反射电子能量损失谱（REELS）已用于研究半无限固体样品的光学和电子性质。然而，由于难以对具有层状纳米结构的电子相互作用进行建模，REELS尚未用于研究纳米材料样品的全部功能。在这项研究中，我们提出了一个空间变化的非弹性平均自由程的数值计算结果，该样品包含一个在Si衬底上变化厚度的Fe层。此外，基于该非弹性散射截面，建立了与该Fe-Si层状结构样品进行电子相互作用的蒙特卡洛模型，并用于再现Fe-Si层状结构的REELS光谱。将Si基板顶部具有不同Fe层厚度的样品的模拟光谱与实验光谱进行比较。这种比较清楚地表明，在Ar之后，Fe层仍保留在实验Si衬底的顶部⁺束溅射为均匀混合层的形式，其中由于Ar ⁺溅射过程中Fe / Si界面的粉碎，实验光谱中没有Fe / Si界面激发。