In this article, we propose a process to fabricate micromachined hotplates, by leveraging the multiuser MEMS process known as PolyMUMPs from MEMSCAP. The PolyMUMPs technology is complemented through self-aligned post-processing steps. This procedure eliminates the requirement of aligning masks during post-processing and enables easy prototyping of microhotplates. Two designs were fabricated, including microhotplates with gold interdigitated-electrodes and temperature sensors. The final device features a suspended membrane with dimensions of 400 × 120 μ m 2 and can achieve a heating temperature of 300 °C while consuming 24.1 mW of power. Long-term heating tests showed that the device can withstand a continuous heating process for more than 150 h at a temperature of 400 °C. These properties make the device suitable for targeting a wide range of applications, including the heating platform of metal-oxide type gas sensors.

中文翻译：

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通过将PolyMUMPs技术与自对准后处理步骤相结合来制造微加工加热板

在本文中，我们提出了一种利用MEMSCAP的多用户MEMS工艺（称为PolyMUMP）来制造微加工热板的工艺。PolyMUMPs技术通过自我调整的后处理步骤得到补充。该程序消除了在后处理过程中对准掩模的要求，并使微热板的原型制作变得容易。制作了两种设计，包括带有金指状电极的微热板和温度传感器。最终设备采用尺寸为400×120μm 2的悬浮膜，可以达到300°C的加热温度，同时消耗24.1 mW的功率。长期加热测试表明，该设备可以在400°C的温度下承受150小时以上的连续加热过程。