In this study, the spring constant of an accelerometer with a liquid-type proof mass was analyzed. Unlike a general solid-type microelectromechanical system accelerometer, the Laplace pressure is considered a restoring force in the analyzed accelerometer. Using a base excitation mathematical model, the sensor output could be estimated for a specific spring constant. Although the estimated sensor output data fit well with the experimental results, the spring constant of the device could also be determined dynamically (for oscillations below 5 Hz). Moreover, the damping constants could be inferred depending on whether sandblasting treatment was performed. Finally, the effects of the oscillation, surface condition, and volume of liquid metal droplets on the spring constant were analyzed.

中文翻译：

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振动条件下的液状证明质量分析

在这项研究中，分析了带有液体型检测质量的加速度计的弹簧常数。与普通的固体微机电系统加速度计不同，拉普拉斯压力被认为是分析加速度计中的恢复力。使用基本激励数学模型，可以针对特定的弹簧常数估算传感器输出。尽管估计的传感器输出数据与实验结果非常吻合，但该设备的弹簧常数也可以动态确定（对于低于5 Hz的振荡）。另外，可以根据是否进行了喷砂处理来推定阻尼常数。最后，分析了振荡，表面条件和液态金属液滴的体积对弹簧常数的影响。