The hysteresis effect in the reactive process was investigated in the magnetron with a magnetized hollow cathode enhanced target (HoCET) in which the target is coupled with the hollow cathode magnetized by the magnetic field of the magnetron. The process, where both the magnetron and hollow cathode plasmas are combined, is compared to the magnetron sputtering. The hysteresis curve in the magnetized HoCET magnetron, recording the titanium emission intensity versus varying content of nitrogen in the gas mixture exhibits a local maximum on the increasing part of the curve. The hysteresis curve is shifted to lower contents of nitrogen than the hysteresis curve for the magnetron. It is concluded that more efficient utilization of the reactive gas takes place in this device.

中文翻译：

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磁化空心阴极增强靶在磁控管中的反应过程和磁滞效应

在具有磁化空心阴极增强靶（HoCET）的磁控管中研究了反应过程中的磁滞效应，其中靶与通过磁控管磁场磁化的空心阴极耦合。将磁控管和空心阴极等离子体结合在一起的过程与磁控管溅射进行了比较。磁化HoCET磁控管中的磁滞曲线记录了钛发射强度与混合气体中氮含量的变化，在曲线的增加部分上显示出局部最大值。磁滞曲线移动到比磁控管的磁滞曲线更低的氮含量。结论是在该装置中发生了反应气体的更有效利用。