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Comparative Study on the Gate‐Induced Electrical Instability of p‐Type SnO Thin‐Film Transistors with SiO2 and Al2O3/SiO2 Gate Dielectrics
Physica Status Solidi-Rapid Research Letters ( IF 2.8 ) Pub Date : 2020-07-21 , DOI: 10.1002/pssr.202000304
Younjin Jang 1 , Jun Shik Kim 1 , Sukin Kang 1 , Jihun Kim 1 , Yonghee Lee 1 , Kwangmin Kim 2 , Whayoung Kim 1 , Heenang Choi 3 , Nayeon Kim 3 , Taeyong Eom 3 , Taek-Mo Chung 3 , Woojin Jeon 4 , Sang Yoon Lee 5 , Cheol Seong Hwang 1
Affiliation  

The gate‐induced electrical instability of SnO thin‐film transistors (TFTs) with SiO2 and Al2O3/SiO2 gate dielectric layers is evaluated. The hysteresis voltage (Vhy) and threshold voltage (Vth) in the transfer characteristics of SnO TFTs depend on the sweep range and rate of gate voltage (VGS). The TFT with an Al2O3/SiO2 gate dielectric layer exhibit reduced Vhy and stable Vth compared with the device without an Al2O3 layer. The introduction of an Al2O3 layer between the SnO channel and the SiO2 layer suppresses the electron and hole trapping at the channel/dielectric interface and contains mobile oxygen vacancies that counteract the hole trapping effect.

中文翻译:

具有SiO2和Al2O3 / SiO2栅极电介质的p型SnO薄膜晶体管的栅诱导电不稳定性的比较研究

评估了具有SiO 2和Al 2 O 3 / SiO 2栅极介电层的SnO薄膜晶体管(TFT)的栅极诱导的电不稳定性。SnO TFT的传输特性中的磁滞电压(V hy)和阈值电压(V th)取决于扫描范围和栅极电压(V GS)的比率。具有Al的TFT 2 ö 3 /二氧化硅2栅极介电层表现出降低的V HY和稳定V与没有的Al的装置相比2 ö 3层。在SnO沟道和SiO 2层之间引入Al 2 O 3层抑制了电子和空穴在沟道/电介质界面处的俘获,并且含有抵消空穴俘获作用的可移动的氧空位。
更新日期:2020-07-21
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