In this study, TiO₂ nanorods are grown on a flexible Polydimethylsiloxane (PDMS) substrate using the hydrothermal technique. The morphological, structural, compositional, optical properties and pressure sensing are investigated in detail by FESEM, XRD, EDX, UV–visible spectrophotometer, and piezoelectric studies. XRD demonstrates the pure rutile phase with a tetragonal structure is formed from deposited TiO₂ thin film. FESEM images confirm the TiO₂ nanorods with average dimensions length ∼620 nm and diameter ∼97 nm whereas the optical spectrum shows the strong light absorption in the UV region with bandgap 3.54 eV. The voltage is measured as a response to the applied mechanical load and the sensitivity of the pressure sensor is obtained as 2.56 × 10⁻⁵ V/N. The flexible pressure sensors (Ag/PDMS-TiO₂) senses over a large pressure range and shows a linear response because of the adjustments in the volume of dielectric that makes the pressure inside the dielectric cavity to vary.

在这项研究中，使用水热技术将TiO ₂纳米棒生长在柔性的聚二甲基硅氧烷（PDMS）衬底上。通过FESEM，XRD，EDX，紫外可见分光光度计和压电研究对形态，结构，成分，光学性质和压力感测进行了详细研究。XRD表明由沉积的TiO ₂薄膜形成具有四方结构的纯金红石相。FESEM图像证实了TiO ₂纳米棒的平均尺寸长度约为620 nm，直径约为97 nm，而光谱显示带隙为3.54 eV的UV区具有很强的吸光性。测量电压作为对施加的机械负载的响应，压力传感器的灵敏度为2.56×10^-5  V / N。柔性压力传感器（Ag / PDMS-TiO ₂）在较大的压力范围内进行感应并显示出线性响应，这是因为介电体体积的调整使介电腔内部的压力发生了变化。