This paper describes a MEMS triaxial gyroscope utilizing three-dimensional piezoresistive elements. MEMS gyroscopes are widely used for robot motion control, drones, mobile phones and so on. Although a piezoresistive sensing element has the potential for high sensitivity to angular velocity via vibrations that occur due to the Coriolis force, a commonly used piezoresistor, which is formed on a device surface, is not suitable to measure in-plane deformations. Thus, it is difficult to realize a sensing element for a triaxial gyroscope with conventional piezoresistors, especially an element for the detection of vertical axis angular velocity. Here, we propose a triaxial gyroscope utilizing surface and sidewall doping piezoresistors as the sensing element. The surface and sidewall doping piezoresistors detect out-of-plane and in-plane vibrations due to the corresponding three-dimensional Coriolis forces, respectively. As a result, the triaxial angular velocity becomes measurable. Th...

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使用表面和侧壁掺杂压敏电阻的MEMS三轴陀螺仪

本文介绍了一种利用三维压阻元件的MEMS三轴陀螺仪。MEMS陀螺仪广泛用于机器人运动控制，无人机，移动电话等。尽管压阻式传感元件具有通过科里奥利力引起的振动对角速度具有高灵敏度的潜力，但是形成在设备表面上的常用压阻器不适合测量平面内变形。因此，难以实现具有传统的压敏电阻的三轴陀螺仪的感测元件，特别是用于检测垂直轴角速度的元件。在这里，我们提出了一种三轴陀螺仪，利用表面和侧壁掺杂压敏电阻作为传感元件。表面和侧壁掺杂压敏电阻分别检测由于相应的三维科里奥利力而引起的面外和面内振动。结果，三轴角速度变得可测量。那个...