Abstract Copper (Cu) and nickel (Ni) nanoparticles have been grown simultaneously on glass and silicon substrates by RF sputtering method to form three Cu/Ni nanocomposites at different deposition times. The existence of Cu and Ni peaks in the X-ray diffraction (XRD) profiles confirms the crystalline structure of samples with Cu and Ni atomic content which have also been characterized by Rutherford backscattering (RBS) method. Moreover, the structural and morphological properties of the prepared nanocomposites have been compared with respect to their morphologies by means of atomic force microscopy (AFM) analysis. In order to compare the surface roughness over different spatial frequency ranges and evaluate surface quality, power spectral density (PSD) of each sample has been extracted from AFM data and also, the experimental and theoretical results have been compared. The fractal nature of these nanocomposites has been finally discussed.

中文翻译：

---

利用功率谱密度和分形几何分析 Cu/Ni 纳米复合薄膜的表面微观形貌

摘要 铜 (Cu) 和镍 (Ni) 纳米粒子已通过射频溅射方法在玻璃和硅衬底上同时生长，以在不同的沉积时间形成三种 Cu/Ni 纳米复合材料。X 射线衍射 (XRD) 图中存在 Cu 和 Ni 峰证实了具有 Cu 和 Ni 原子含量的样品的晶体结构，这些样品也已通过卢瑟福背散射 (RBS) 方法表征。此外，通过原子力显微镜 (AFM) 分析比较了制备的纳米复合材料的结构和形态特性及其形态。为了比较不同空间频率范围内的表面粗糙度并评估表面质量，从 AFM 数据中提取了每个样品的功率谱密度 (PSD)，并且，实验结果和理论结果进行了比较。最后讨论了这些纳米复合材料的分形性质。