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High-performance and wearable strain sensors based on graphene microfluidics and serpentine microchannels for human motion detection
Microelectronic Engineering ( IF 2.3 ) Pub Date : 2020-07-01 , DOI: 10.1016/j.mee.2020.111402
Yang Liu , Jianze Huang , Guifu Ding , Zhuoqing Yang

Abstract Inspired by microfluidics and microchannels, we demonstrate a new method based on graphene microfluidics and serpentine microchannels (GMSM) to fabricate and pattern graphene/polymer composite film for pressure and strain measurement. With several types of experiment paraments including concentration of graphene suspension, deposition frequency and width of microchannels, the resistance response of the sensors is measured as a function of mechanical stimulations. The pressure sensor exhibits the high sensitivity (maximum: 0.27 /MPa) with ultrawide range (0–3 MPa), fast response and recovery time (88 ms, 217 ms), good repeatability (250 cycles). For the strain sensor, high sensitivity (maximum: 60) with high deformation limits (75%), good repeatability (2000 cycles) have been achieved. Finally, some human bio-signals are measured, demonstrated that the sensors have good potential for human-motions detecting and health surveillance.

中文翻译:

基于石墨烯微流体和蛇形微通道的高性能可穿戴应变传感器用于人体运动检测

摘要 受微流体和微通道的启发,我们展示了一种基于石墨烯微流体和蛇形微通道 (GMSM) 的新方法,用于制造和图案化石墨烯/聚合物复合膜,用于压力和应变测量。通过多种类型的实验参数,包括石墨烯悬浮液的浓度、沉积频率和微通道的宽度,传感器的电阻响应被测量为机械刺激的函数。该压力传感器具有高灵敏度(最大:0.27 /MPa)、超宽量程(0-3 MPa)、快速响应和恢复时间(88 ms、217 ms)、良好的重复性(250次循环)。对于应变传感器,实现了高灵敏度(最大值:60)、高变形极限(75%)、良好的可重复性(2000 次循环)。最后,测量了一些人体生物信号,
更新日期:2020-07-01
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