The rate coefficients for the electron impact ionization and electronic state excitation of the CO2 molecule are calculated in non-equilibrium conditions in the presence of time-dependent electric field. A Monte Carlo simulation has been employed in order to determine non-equilibrium electron energy distribution functions in the CO2 gas, within one period of time-dependent radio-frequency (RF) electric field. By using the distribution functions, ionization rate coefficients for the CO2 molecule have been obtained within one period in RF frequency range at effective reduced electric field up to 500 Td. All obtained rate coefficients have been period averaged, as they can be of use in practical applications in the modeling of RF discharges in CO2.

中文翻译：

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CO2在射频电场中的电离和电子态激发

CO2 分子的电子碰撞电离和电子态激发的速率系数是在存在时间相关电场的非平衡条件下计算的。已采用蒙特卡罗模拟来确定在一个时间相关的射频 (RF) 电场周期内 CO2 气体中的非平衡电子能量分布函数。通过使用分布函数，已经获得了在射频频率范围内，有效还原电场高达 500 Td 的一个周期内 CO2 分子的电离率系数。所有获得的速率系数都经过周期平均，因为它们可用于模拟 CO2 中的 RF 放电的实际应用。