Oxidation of metals can provide a functional oxide film or an oxide layer that can lead to material degradation causing performance limiting concerns. Because of the technological and economic impacts of oxidation, understanding early-stage oxidation growth and its mechanisms is of high importance. Unfortunately, poor empirical data during early-stage oxidation has left our current understanding of oxidation incomplete and woefully inadequate. Measurement techniques previously used for oxidation kinetics characterization include microbalance, x-ray diffraction, Fourier-transform infrared spectroscopy, and spectroscopic ellipsometry. However, these techniques lack the necessary time-resolution or vertical resolution in addition to not providing any spatial data, which is essential to early-stage oxidation studies to understand both oxidation kinetics and mechanisms. A novel rapid and surface-sensitive data collection technique that provides three-dimensional spatial data of a gro...

中文翻译：

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白光干涉仪用于早期金属氧化物生长表征

金属的氧化可提供功能性氧化膜或氧化层，其可导致材料降解，从而引起对性能的限制。由于氧化的技术和经济影响，了解早期氧化生长及其机理非常重要。不幸的是，早期氧化过程中不良的经验数据使我们目前对氧化的理解不完整，严重不足。以前用于氧化动力学表征的测量技术包括微量天平，X射线衍射，傅立叶变换红外光谱和椭圆偏振光谱。但是，这些技术除了不提供任何空间数据外，还缺少必要的时间分辨率或垂直分辨率，这对于早期氧化研究以了解氧化动力学和机理至关重要。一种新颖的，对表面敏感的数据收集技术，可提供几何图形的三维空间数据。